3D Laser Lithography

System Components

• Laser Source: Laser Toptica - 120 fs, 780 nm, 80 MHz, 120mW;
• Zeiss inverted microscope;
• Piezo stage: PIMars - 300x300x300 um³;
• Translation stages - 100x100 mm²;
• Samples holders for:
  22 x 22 mm²; 25 x 25 mm²; 45-76 x 19-26 mm²; 5" x 5";
  diam 30mm; diam 2"; diam 4"; diam 11-25.4 mm;
• Microscope Camera: 1.4 Mega Pixels;
• Microscope Objectives: 100x oil, 100x DiLL, 63x, 20x.

Performances

• 2D lateral resolution: 250 nm;
• 2D lateral feature size: 90 nm;
• 3D lateral feature size: 150 nm;
• Repeatability (coarse stage) < 1.5 um.

Features

• 3D printing by Two-Photon Polymerization - TPP;
• Dip-in Laser Lithography (DiLL);
• (SU8, Ormocers, IP-L, IP-Dip, etc.);
• CAD import (STL files);
• GWL files;
• Automatic sample positioning;
• Autofocus;
• Tilt Correction;
• PerfectShape corrections;